PSA Nitrogen Generator 99.999% Ultra-High Purity
The top purity tier: a CMS twin-tower PSA generator at 99.999% N₂ with residual oxygen target confirmed against the selected model datasheet, 1–2000 Nm³/h overall series range; confirm capacity for the selected purity/model and up to outlet pressure up to 0.65 MPa per supplier brochure.
This ultra-high-purity PSA nitrogen generator produces 99.999% nitrogen using carbon molecular sieve (CMS) in a twin-tower pressure swing adsorption system, with residual oxygen target confirmed against the selected model datasheet.
Flow ranges from 1 to 2000 Nm³/h with outlet pressure up to 0.65 MPa per the supplier brochure, and the towers alternate between adsorption and regeneration to give a continuous supply.
The very low oxygen content suits the most demanding cleanliness requirements, where even single-figure ppm oxygen would affect the process.
It is used for semiconductor manufacturing, pharmaceutical sterile filling, laboratory work and high-purity blanketing.
| Parameter | Specification |
| Purity | 99.999% N₂ |
| Flow | 1–2000 Nm³/h overall series range; confirm capacity for the selected purity/model |
| Outlet pressure | up to 0.65 MPa per supplier brochure; confirm selected model |
| Dew point | -40°C or lower |
| Residual O₂ | Confirm residual oxygen target against the selected model datasheet |
| Adsorbent | Carbon molecular sieve (CMS) |
| Technology | CMS twin-tower PSA (carbon molecular sieve), continuous on-site supply |
| Feed air | model-specific pressure, dew point ≤-40°C, oil-free |
| Startup time | approximately 15–30 minutes (supplier brochure; model dependent) |
| Control | PLC automatic; optional HMI touch screen |
| Typical duty | Semiconductor manufacturing, pharmaceutical sterile filling, laboratory use and high-purity blanketing |
The PSA nitrogen range is published as a purity and capacity configuration rather than a numbered model table: fix the purity tier first, then the flow, outlet pressure and dew point for the duty.
- Adsorption towers: two adsorber vessels alternate between adsorption and regeneration, so the nitrogen supply is continuous.
- Molecular sieve: carbon molecular sieve (CMS) retains oxygen at pressure while nitrogen passes through as product gas; when a bed approaches saturation it is depressurised and the captured oxygen is vented.
- Air dryer: the package includes an air dryer that brings the compressed-air moisture load down so the feed-air dew point requirement is met before the air reaches the sieve bed.
- Filtration: filtration stages remove oil aerosol and dust carried over from the compressor and receiver, protecting the sieve bed.
- Air receiver: a buffer tank (air receiver) between the compressor and the PSA towers steadies the feed-air supply.
- Control cabinet: PLC automatic control with an optional HMI touch screen; the control cabinet manages the valve cycle and the operating parameters.
- Purity monitoring: an oxygen analyser monitors residual oxygen in the product nitrogen, and its calibration is checked on schedule.
- Feed air: clean compressed air at model-specific pressure with a dew point of -40°C or lower, oil-free.
- Semiconductor manufacturing: supplies ultra-high-purity nitrogen for semiconductor process steps.
- Pharmaceutical sterile filling: provides nitrogen for sterile filling and product protection operations.
- Laboratory: serves laboratory requirements for high-purity nitrogen.
- High-purity blanketing: blankets sensitive processes with ultra-low-oxygen nitrogen.
- Electronics and photonics: covers precision electronics duties that need a controlled atmosphere.
- Analytical instruments: supports instruments that require a very low oxygen background level.
- Confirm the residual oxygen requirement first, because the generator publishes residual oxygen target confirmed against the selected model datasheet and that figure sets the sieve charge and the achievable flow.
- Check the flow and outlet pressure against the 1 to 2000 Nm³/h and up to 0.65 MPa (confirm selected model) ranges.
- Specify the feed-air pressure and treatment requirements precisely, as it is critical for reaching 99.999% purity: oil-free with a dew point of -40°C or lower.
- Confirm the purity monitoring arrangement, since the analyser and its calibration schedule are part of holding this tier.
- State the power supply and installation conditions, and allow space for the dryer, filtration stages and air receiver.
- Plan a liquid-nitrogen backup where an interruption would be unacceptable for a qualified process.
What purity does this generator deliver?
It delivers 99.999% nitrogen with residual oxygen target confirmed against the selected model datasheet, using CMS twin-tower PSA.
Where is 99.999% nitrogen used?
For semiconductor manufacturing, pharmaceutical sterile filling, laboratory work and high-purity blanketing.
What flow and pressure are available?
Flow ranges from 1 to 2000 Nm³/h with outlet pressure adjustable up to 0.65 MPa per the supplier brochure.
What is required to reach 99.999%?
The feed air has to be clean, oil-free and dry (model-specific pressure, dew point -40°C or lower), and the sieve charge, cycle and purity monitoring are set for this tier.
Can purity and flow both be maximised?
No. Higher purity consumes more feed air, so the achievable flow falls for the same skid size; specify the purity and flow you actually need.
Related Products
- PSA Nitrogen Generator 99.99–99.999% Purity
- PSA Nitrogen Generator
How to Choose a 99.999% PSA Nitrogen Generator
Quick answer: Choose this tier when residual oxygen must be held residual oxygen target confirmed against the selected model datasheet: the generator reaches 99.999% N₂ at 1–2000 Nm³/h overall series range; confirm capacity for the selected purity/model with a -40°C dew point. Feed-air quality and purity monitoring decide whether the tier can be held.
When is 99.999% purity justified?
Use this tier for the most cleanliness-sensitive duties — semiconductor manufacturing, pharmaceutical sterile filling, laboratory work and high-purity blanketing — where residual oxygen target confirmed against the selected model datasheet is specified and cheaper tiers cannot meet it.
What sets the achievable flow?
The sieve charge and the feed-air pressure and treatment requirements. Higher purity consumes more feed air, so the nitrogen flow falls for the same skid size; read purity and flow together, as the PSA nitrogen generator guide explains.
How is purity held and verified?
The product gas is monitored with an oxygen analyser whose calibration is checked on schedule, and the feed air is kept dry and oil-free by the air dryer and filtration stages.
Selection Data to Send Our Engineers
- Residual oxygen requirement (ppm)
- Required flow (Nm³/h)
- Outlet pressure (MPa)
- Feed-air quality and supply
- Purity monitoring and calibration needs
- Operating hours and site conditions
Industry Applications
Explore how this equipment can be applied in related industrial sectors and review application-specific selection guidance.
Technical selection & RFQ
Request a Quote for PSA Nitrogen Generator 99.999% Ultra-High Purity
Looking for a PSA nitrogen generator supplier for an industrial project? Share the operating conditions below so our team can review the duty, recommend a suitable configuration and prepare a quotation. Final model selection and performance should be confirmed against your actual process conditions and the applicable product data.
Information to include in your inquiry
- Required nitrogen purity: Target N₂ purity (%) and any outlet quality requirement
- Nitrogen flow: Required flow rate and whether it is peak or continuous demand
- Operating pressure: Required outlet pressure and downstream pressure losses
- Application & operating profile: Packaging, electronics, laser cutting, chemical process, or other use; operating hours
- Site utilities: Available power supply, compressed-air conditions, ambient temperature and installation space
Not all details are available yet? Send the information you have, your datasheet or a process description. We can identify the missing selection data before confirming a model.