PSA Nitrogen Generator 99.999% Ultra-High Purity

This ultra-high-purity PSA nitrogen generator produces 99.999% nitrogen using carbon molecular sieve (CMS) in a twin-tower pressure swing adsorption system, with residual oxygen below 1 ppm.

Flow ranges from 1 to 2000 Nm³/h with outlet pressure from 0.1 to 1.0 MPa, and the towers alternate between adsorption and regeneration to give a continuous supply.

The very low oxygen content suits the most demanding cleanliness requirements, where even single-figure ppm oxygen would affect the process.

It is used for semiconductor manufacturing, pharmaceutical sterile filling, laboratory work and high-purity blanketing.

The PSA nitrogen range is published as a purity and capacity configuration rather than a numbered model table: fix the purity tier first, then the flow, outlet pressure and dew point for the duty.

• Adsorption towers: two adsorber vessels alternate between adsorption and regeneration, so the nitrogen supply is continuous.
• Molecular sieve: carbon molecular sieve (CMS) retains oxygen at pressure while nitrogen passes through as product gas; when a bed approaches saturation it is depressurised and the captured oxygen is vented.
• Air dryer: the package includes an air dryer that brings the compressed-air moisture load down so the feed-air dew point requirement is met before the air reaches the sieve bed.
• Filtration: filtration stages remove oil aerosol and dust carried over from the compressor and receiver, protecting the sieve bed.
• Air receiver: a buffer tank (air receiver) between the compressor and the PSA towers steadies the feed-air supply.
• Control cabinet: PLC automatic control with an optional HMI touch screen; the control cabinet manages the valve cycle and the operating parameters.
• Purity monitoring: an oxygen analyser monitors residual oxygen in the product nitrogen, and its calibration is checked on schedule.
• Feed air: clean compressed air at 0.6–0.8 MPa with a dew point of -40°C or lower, oil-free.

• Semiconductor manufacturing: supplies ultra-high-purity nitrogen for semiconductor process steps.
• Pharmaceutical sterile filling: provides nitrogen for sterile filling and product protection operations.
• Laboratory: serves laboratory requirements for high-purity nitrogen.
• High-purity blanketing: blankets sensitive processes with ultra-low-oxygen nitrogen.
• Electronics and photonics: covers precision electronics duties that need a controlled atmosphere.
• Analytical instruments: supports instruments that require a very low oxygen background level.

• Confirm the residual oxygen requirement first, because the generator publishes below 1 ppm and that figure sets the sieve charge and the achievable flow.
• Check the flow and outlet pressure against the 1 to 2000 Nm³/h and 0.1 to 1.0 MPa ranges.
• Specify the feed-air quality precisely, as it is critical for reaching 99.999% purity: oil-free with a dew point of -40°C or lower.
• Confirm the purity monitoring arrangement, since the analyser and its calibration schedule are part of holding this tier.
• State the power supply and installation conditions, and allow space for the dryer, filtration stages and air receiver.
• Plan a liquid-nitrogen backup where an interruption would be unacceptable for a qualified process.